Low-Vacuum, Dual-Beam SEM/FIB

Dual-beam SEM/FIB Quanta 3D FEG combines advances in ion and electron optics and the SEM technology of FEI’s Quanta family of products. The system features a high current ion column for rapid, site-specific cross-sections of samples to reveal sub-surface structures and features while electron source design delivers improved SEM imaging. Further, increased electron beam current enables higher throughput spectroscopy.